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EBSD analysis device Product List

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[Example of Analysis by EBSD] Chip

[Example of Analysis by EBSD] Chip

I will introduce an example of analysis using EBSD where orientation was observed in the Al wiring.

We will introduce an example of analysis of chip surface wiring (Al) using EBSD. The package resin was opened using a chemical solution/RIE, and an analysis of the Al pattern on the chip surface was conducted using EBSD. As a result, orientation was observed in the Al wiring. The normal orientation is distributed, suggesting the presence of many crystals. 【Overview】 ■ Analysis Method - The package resin was opened using a chemical solution/RIE. - An analysis of the Al pattern on the chip surface was conducted using EBSD. ■ Results - Orientation was observed in the Al wiring. *For more details, please refer to the PDF document or feel free to contact us.

  • Electrical Equipment Testing
  • Other analytical equipment

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[Example of analysis using EBSD] Via

[Example of analysis using EBSD] Via

The EBSD method allows for the estimation of crystal size distribution and residual stress.

We will introduce an example of analysis using EBSD for vias (Cu) formed in laminated substrates. The EBSD method allows for the estimation of crystal size distribution and residual stress. Additionally, by highlighting on the map, the features that appear in the graph can be visualized. [Overview] ■Observation of crystal structure using EBSD ・IPF map ・GROD map ・Crystal grain distribution map *For more details, please refer to the PDF document or feel free to contact us.

  • Electrical Equipment Testing
  • Other analytical equipment

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Example of analysis using EBSD (ceramics)

Example of analysis using EBSD (ceramics)

Examples of analysis using EBSD will be introduced, such as 'Observation/Elemental Analysis' and 'Analysis by EBSD'!

We will introduce an example of analysis using EBSD for ceramic (Al2O3). In the "Observation/Elemental Analysis," it was determined to be Al2O3 based on elemental analysis using EDX, and it was observed that Si was scattered as shown in the map. In the "Analysis using EBSD," the distribution of crystal size and orientation can be confirmed using the EBSD method, and by highlighting on the map, the features that appeared in the graph can be visualized. [Analysis Overview] ■ Observation/Elemental Analysis - Observation using SEM and elemental analysis using EDX ■ Analysis using EBSD - Observation of crystal structure using EBSD *For more details, please refer to the PDF document or feel free to contact us.

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[Data] Whisker Analysis by EBSD

[Data] Whisker Analysis by EBSD

Introducing a case study analyzing whiskers that occurred on the lead terminals of an IC package!

This document introduces a case study on whiskers that occurred on the lead terminals of IC packages, where cross-sections were created through mechanical polishing, followed by SEM observation and EBSD analysis. It includes surface SEM images of the IC package as well as cross-sectional SEM images. It is evident that the crystal grains and grain boundaries measured by the EBSD method are consistent. We invite you to read it. 【Published Case Studies】 ■Observation/Cross-section preparation ■Analysis using EBSD *For more details, please refer to the PDF document or feel free to contact us.

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Example of analysis using EBSD: Silicon wafer

Example of analysis using EBSD: Silicon wafer

The measured silicon wafer is single crystal! The IPF map, pole figure, and inverse pole figure resulted in relatively simple outcomes.

Here is a case study of a silicon wafer analyzed using EBSD. A small piece was cut from the wafer, and an IPF map was obtained for a central area of 50×50 μm. The measurement area shows red, indicating the {001} plane, and the absence of grain boundaries confirms that it is a single crystal. Since the measured silicon wafer is a single crystal, the IPF map, pole figure, and inverse pole figure resulted in relatively simple outcomes. *For more details, please refer to the PDF document or feel free to contact us.*

  • Other analytical equipment
  • Electrical Equipment Testing

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